MACHINE Semiconductor / automation related
Space Ionizer System│
Construction of System
Body portion
①The main body:IDS3000
②Output monitor:IDS-002
③High voltage cable (10m×4lines): IDH-2010
④A wire electrode (10m×4pcs): IDW-2003- Frame part (H3.5m×8pcs)
- Main body setting stand
- The Object are Particulate dusts(Effective Range: Wide Space)
- Decrease of the humidity control cost spent ondestaticizing operations in clean room.
- Polarity (±)irrelevant to the objects can be deleted.
Comparison between Space Ionizer System and Ionizer
| Item | Space Ionizer System | Ionizer |
| Manner | Discharges of High Voltages on Special Electrical Lead | Positive and Negative Ions Generation from Point Discharge |
| Shape of Electrode; | SUS Material Electrical Lead | Metal Pin |
| Need Air Supply or not | Not necessarily | Necessary for the most par |
| Dust Generation | None | Tip of Electrode may cause dust clustering |
| Ozone Generation or not | No | Yes |
| Maintenance & Care | Clean Electrode; | Clean and Change Electrode |
Actual Erection Example 1: Effect of Construction: Reduction on Number of Particulate dust in Space
Actual Example 2: Effect of Construction: External humidity control is unnecessary.
Actual Example 3: Effect of Construction Reduction on foreign matters attached to wafer.
Security of System
Computation for Electricity Consumption
